Semiconductor solutions
Contamination-free process chemistry for front-end fabrication steps.
Applications
Process chemistry under control — at every process step
4Tex systems are used wherever ultra-pure fluids must be precisely temperature-controlled, safely supplied and handled contamination-free.
Wet processing
Precisely temperature-controlled wet chemistry
For etch, clean and wet-chemistry processes, the I²R heater delivers precisely controlled process temperatures — with rapid response and no contamination from metallic surfaces.
Ultra Pure Fluids
Ultra Pure Water, acids, bases and solvents
The metal-free construction from PTFE and PFA makes 4Tex systems compatible with ultra-pure water as well as acids, bases and aggressive process chemicals — while maintaining purity.
Point of use heating
Heating directly at the point of use
Thanks to the low internal volume of 60 ml and the rapid thermal response, the I²R heater is ideal for heating directly at the process point — with minimal dead volume and minimal chemical inventory.
Further areas
From wafer fabrication to packaging
Chemical delivery
Safe, controlled supply and dosing of process chemicals via the bCDS series.
Wafer manufacturing
Stable, repeatable process conditions for wafer processing.
Advanced packaging
Precise temperature control for plating and packaging processes.
Contamination-free processing
Metal-free fluid path eliminates particle and metal contamination.
Thermal & fluid control
Integrated temperature and flow monitoring for stable processes.
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