Equipment service
Service and support for semiconductor process equipment — from maintenance to upgrading existing systems.
Business areas
Service and support for semiconductor process equipment — from maintenance to upgrading existing systems.
Proprietary products for the contamination-free heating and handling of ultra-pure process fluids.
Design, integration and further development — customer-specific and in close coordination with OEMs and fabs.
About 4Tex
Headquartered in Villach, Carinthia, 4Tex combines three decades of semiconductor experience with in-house development and manufacturing. Our focus: the contamination-free heating and precise handling of ultra-pure process fluids.
From the proprietary I²R inline heater and modular chemical delivery systems to high-precision temperature sensors, we deliver components and systems that integrate seamlessly into existing OEM and fab environments.
More about the company
Our core competencies
Proprietary 4Tex I²R technology with metal-free fluid contact and optimised heat-transfer geometry. Thermal response within seconds.
Learn moreControlled, safe and contamination-free supply of process chemicals — the bCDS series is individually configured for your wet-chemical processes.
Learn moreHigh-purity fluoropolymer PT100 sensors for the reliable, drift-free temperature monitoring of ultra pure water, high-purity chemicals and process gases.
Learn moreResponsive technical support, maintenance and lifecycle services for reliable system operation.
Learn moreProfessional refurbishment of SEZ systems and components under controlled cleanroom conditions.
Learn moreCustom-engineered solutions for complex wet-chemical processes, system integration and process optimization.
Learn moreCertified processes to UL499 · CE.
30 years of experience in semiconductor technology.
Patented I²R technology for maximum accuracy.
Individual solutions for your requirements.
Application areas
4Tex systems secure precisely temperature-controlled, contamination-free process chemistry across the entire fab flow — from wafer fabrication to packaging.
Precise temperature control for etch, clean and wet-chemistry processes.
Contamination-free process chemistry for wafer fabrication and front-end processes.
Stable process conditions for plating and packaging applications.
Handling and heating of Ultra Pure Water, acids, bases and solvents.
Controlled supply and dosing of aggressive process chemicals.
Metal-free fluid path eliminates particle and metal contamination.
Heating directly at the point of use — minimal dead volume, fast response.
Stable, repeatable process conditions for wafer processing.
Integrated temperature and flow monitoring for stable processes.
Why 4Tex
10 years of development and 10 patents behind our technologies.
Our own production facility in Villach — fast response times for service and spare parts.
Deep expertise from three decades of collaboration with equipment builders and fab operators.
Collaboration
Whether a single component or an integrated system — our engineering team supports you from design to commissioning.